尚豐科技向用戶提供專業的的電子束吸收電流分析系統EBAC/RCI
 
EBAC/RCI原理

EBAC/RCI電子束吸收電流分析系統，能夠方便快速的定位半導體芯片電路中的短路及失效點位置，不但可以對同層電路，而且可以對次表層，甚至表層下第三層、第四層電路進行失效點的精確定位，因此能夠對半導體芯片電路或相關材料進行快速準確的失效分析。

目前，集成電路芯片設計越來越復雜，關鍵尺寸和金屬連線線寬越來越小，傳統的失效點定位方法，如微光顯微鏡或光束又到電阻變化鞥，由于其分辨率不足，導致不能精確地定位電路故障點位置，電壓襯度方法雖然在一些開路短路失效分析中能快速地定位失效點，但只是局限于電路同層分析。

EBAC/RCI電子束吸收電流分析系統是基于掃描電鏡的分析系統，在保留掃描電鏡高分辨率的前提下，能夠對同層芯片電路進行高準確定位，同時能夠對次表層甚至表面下第三、第四層電路進行失效點定位，因此越來越多的應用于先進制程芯片的失效分析。在涉及多層金屬層的失效定位分析時，EBAC/RCI方法更加簡便精確，可保證分析的成功率，并縮短分析周期。

EBAC/RCI acquisition

The lowest noise Electron Beam Absorbed Current (EBAC)
and Resistive Contrast Imaging (RCI)   

Find exact location of any open,resistive or shorting defect
 

• Localize metal line cuts caused by cracking,corrosion, electro-migration, or foreign particles

• Identify resistive opens caused by interface contamination at via interconnects

• Pinpoint location for direct TEM lamella FIB preparation 

Characterize interconnects with highest resolution
 

• Reveal electrical integrity of nets with sub-mciron lateral resolution and bridge from EFA to PFA

• Diagnose fabrication and long term issues, including contamination,metal pattering defects, resistive interconnectors, or electro-migration

• Directly isolate defects to the exact layer and die location, and improve them to product improvement actions
   

Verify device operation modes with built-in biasing for voltage contrast

• Image bias/voltage contrast in delayered devices

• Monitor operation of devices under bias

• Compare imaged behaviour with device design

Localize defects in thin dielectric layers 

• Visualise and localise weaknesses in gate oxide (GOX) and capacitor oxide (COX) before breakdown

• Pinpoint oxides shorts caused by ESD or EOS with sub-micron resolution

• Preserve the original defect signature with power dissipation in the lower nW range during localization

Access failures invisible in voltage contrast

• Find low resistances that allow charge tunneling trough the interconnects

• Investigate structures in contact with the silicon substrate

• Characterize large metal structures

尚豐科技致力于引進推廣先進的材料、生物顯微觀測及微區分析儀器，向科研人員提供高附加值服務。

我們擁有一支涉及眾多領域高素質的應用支持團隊，為各行業的應用需求提供專業的解決方案和售后服務。

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